Semiconductor manufacturing technology textbook recommendations

ufacturing technology and have come across a possible candidate published b y the SPIE: Introduction to Semiconductor Manufacturing Technology, 2ed, Ho ng Xiao, 2012, 704pp, ISBN: 9780819490926, Volume: PM220.

e special, because the review says it has a minimal amount of maths, physic s or chemistry. If I'm going to buy it, I want something a bit meatier. Any recommendations?

Hi, I don't know the book that you linked to. I also don't know much about Semi-manufacturing... so take this for what it's worth, (maybe not much). But I bought a used copy of the 3rd edition of P.Gray and R. Meyers "Analy sis and Design of Analog Integrated Circuits", several years ago. Plenty o f 'meat'! Maybe someone else will comment/ recommend something?

George H.

Back in 60's?, or 70's Motorola published a great BASIC semiconductor designing/manufacturing book. Don't remember the name, but have a copy in storage. If you find it, it was larger than standard, more like 10 x 12

Had great pictures and diagrams and equations.

Maybe somebody will remember the name.

Uh, it is OLD and BASIC. Manufacturing capabilities and techniques have followed Bob Noyce's curve ever since.