Semiconductor manufacturing technology textbook recommendations

I'm considering purchasing a textbook for self study on semiconductor manuf acturing technology and have come across a possible candidate published by the SPIE: Introduction to Semiconductor Manufacturing Technology, 2ed, Hong Xiao, 2012, 704pp, ISBN: 9780819490926, Volume: PM220.

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I'm holding off buying it straight away, even though it is a member's sale special, because the review says it has a minimal amount of maths, physics or chemistry. If I'm going to buy it, I want something a bit meatier. Any r ecommendations?

Thanks in advance.

Reply to
grodzicky_j
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I think the ugly math is in the semiconductor physics books. If you want to lean about manufacturing, this book sounds good to me.

You would really have to ask on a forum used by process engineers, not designers. The average designer these days has probably never worn a bunny suit.

Reply to
miso

to lean about manufacturing, this book sounds good to me.

signers. The average designer these days has probably never worn a bunny s uit.

Probably not. Back when I got to wear a bunny suit from time to time, the e xpectation was that the wafers were eventually going to be shifted from mac hine to machine in air-tight cassettes, latching onto carefully purged airl ocks, and the fabs wouldn't need the bunny suits on the shop floor.

The fabs would still need clean areas in which to dismantle and reassemble the machines, but the chip designers wouldn't have been allowed into those areas anyway.

--
Bill Sloman, Sydney
Reply to
Bill Sloman

ufacturing technology and have come across a possible candidate published b y the SPIE: Introduction to Semiconductor Manufacturing Technology, 2ed, Ho ng Xiao, 2012, 704pp, ISBN: 9780819490926, Volume: PM220.

e special, because the review says it has a minimal amount of maths, physic s or chemistry. If I'm going to buy it, I want something a bit meatier. Any recommendations?

Please check out the 2008 textbook by Micheal Quirk and Julian Serda - named 'Semiconductor Manufacturing Technology'. These are chemical engineers, by the way. Also, if you have any connections with any University, please check out the engineering library. Years ago, when I was at UT Austin, I came across an excellent book, just say 80 - 90 pages, with detailed practical worked out examples related to dry/wet oxide growth, etching time, how to estimate time for doping for say a predetermined donor concentration etc., -- the small but crucial steps that make the whole process work. Unfortunately, I forget the name of the book. HTH.

Reply to
dakupoto

Thank you, miso, Bill Sloman and daku.

Like you say, most of the maths and physics I'll find in a semiconductor ph ysics text. It is the chemical processes and materials science I have only rudimentary knowledge of and am curious about. I'm especially curious about the transition from a discrete component prototype circuit to an integrate d circuit.

I did look around google groups for a more appropriate forum and did find ' Semiconductor Fabrication', but that forum is dead and full of spammers.

I have found also some youtube posts on how to make your own FETs, which I hope to try.

Reply to
grodzicky_j

Did you find the Motorola book?

Also, should look into Ion Implantation. It is my understanding that without such, CMOS could never have come into existence.

To me, there are two MAJOR technologies in semiconductor processing:

  1. chemical processes
  2. masking processes

Major things have happened in both

Reply to
RobertMacy

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