Hello,
I'd like to measure the position of a non-conductive thing with a 7mm bore that travels 10mm. I need a precision of at least 1 micron. Linearity is not a concern; I just must take a reading, move the thing by a few hundred microns (no exact position required), do something, and move it back to within 1 micron of the original position. The while thing is in vacuum.
I thought about installing a metal cylinder with ID6mm, length
10mm, inside the bore, and down the center a peg with two 10mm segments, OD5mm. I'd drive the outer electrode with a 10kHz, 1V sine and bring the other electrodes into a couple of TIA stages, subtract the two signals, do synchronous rectification and be done.The geometry should give me a capacity of 300pF/m, corresponding to a capacity change of 0.3fF per micron displacement. This translates to a AC current change of roughly 18pA/micron per segment with the excitation frequency/amplitude as assumed above. The max output amplitude (one 10mm inner cylinder fully inside the outer one -> 3pF) is 180nA. 27M feedback resistors in the transresistance stages would translate this into a +/- 10V output swing, making one micron displacement equivalent to 1mV output signal change. This should easily be detectable with synchronous rectification.
Do you see any gross flaws in this design idea? Any better ideas? The geometry is pretty un-changeable; all I've got is a hole up which I can stick things.*)
--Daniel
*) Thanks, I pre-got that joke.