Any body have used SUPREM-IV?

Jan 10, 2006 3 Replies

I have undergone a problem of suprem-IV! When I designed the structure use the line command as the description it tells me that the region 1 is not a increasing spacing.



Who can tell me the formula of the line command! Pls mail to me. email/msn: snipped-for-privacy@china.com.cn



Thanks in advance!


No !

You come back here and read the replies ! That's how usenet works.

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Graham

http://66.102.7.104/search?q=cache:MEuILK9LEgkJ:members.iinet.net.au/~angus/foxpro/foxfaq1.html+usenet+do-not-ask-*-*-email-*+*-*-*-*-*-defeats-the-purpose-of-the-newsgroup+many-people-*-*-*

In case you can't get that behind the Great Firewall of China, the stuff I'm pointing at is at the 90% mark here:

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All parts of that page that are not specific to FoxPRO are worth reading.

Hi,Graham Thanks for your reply! I've also got this manual and read it in detail! when I ran a program designed by myself it displayed that the mesh could not be defined! So I don't know how to define a rectangular mesh using line command! And the following is my program which easily modeling the ion implantation process would you pls debug it for me!

#the x dimension definition line x loc = -4.0 tag = lft line x loc = 0.0 spacing=0.05 line x loc = 5.0 tag = rht

#the vertical definition line y loc = 0 spacing = 0.02 tag = top line y loc = 1.5 spacing = 0.05 line y loc = 4.0 tag=bot

region silicon xlo = lft xhi = rht ylo = top yhi = top bound exposed xlo = lft xhi = rht ylo = bot yhi = bot

init boron conc=1e14 scale=2

deposit oxide thick=0.02

implant phos dose=3e14 energy=20 pearson

diffuse time=30 temp=1000

structure outf=test.str

Thanks!

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