Dear All,
I want to calculate the consumption of the wet station and rinse-dryer. Does anyone have the information about:
(1)How much water and N2 is needed for 4 cycles rinsing in one rinsing tank (for 2" or 4" wafers rinsing)?
(2)How much water and N2 needed for general dry process for a 4" rinse-dryer?
Best regards,
Egan