Thermal Pressure Gauges

Apr 28, 2015 18 Replies

I've been thinking about measuring pressure. What I call "thermal" pressure gauges. The point where the thermal conductivity of the gas goes away.



1 Torr to 1 milli Torr (or so) These come in two flavors, two lead Pirani's (the element is both heater and sensor) and four lead Thermocouple where there is a separate heater and sensor. (The sensor could also be an RTD.) (Hmm , you might want six leads, four for the thermometer.)

Here's wiki's start.

formatting link



and Piranis

formatting link



The thermocouple link is weak,

formatting link



But I don't really like TC as temp sensors, always contact issues.



I like this idea of a thermistor as a "Pirani".

formatting link



A nice cute loop...though I might sprinkle in some more opamps to make life easier, And He's got real data!!! with the voltage still rising at 100 torr (1 micron = 1 milli Torr)



I don't like the big DC offset (at low pressure) this could be from the leads or radiation losses. (maybe run at a lower temperature.)



So that brings me to my three questions. What style (heater and sensor in one, or separate) What resistance (of sensor and heater) operated at what temperature (above ambient) (I'm leaning towards R's as big as possible and lower temperature differences...)



George H.



The single-wire pulsed thing is cute, because it can correct for ambient temperature, too. It's just slow.

John Larkin Highland Technology, Inc picosecond timing laser drivers and controllers jlarkin att highlandtechnology dott com http://www.highlandtechnology.com

? Well I hope you can put in the implied question marks.

Much as I dislike TC's a temperature difference makes me think of a TC on the heater and another stuck on the vacuum can as ambient. Then I get the difference.

George H.

How about a tungsten filament as Pirani... a ton of hits

formatting link

Geo,

How about two thinfilm surface-mount RTDs on a PCB-type substrate, kapton flex maybe. Kapton is a rotten heat conductor. Put a heater next to one of them, a resistor or a zigzag trace. Maybe use those cool SOT-23 Zetex nickel RTDs.

Make it t-shaped, with the RTDs on the wings and the middle thing a long connection pigtail that mates with a vacuum feedthru connector. Mounting hole somewhere.

Or do the pulse thing with one RTD and a bunch of math.

I guess radiation cooling will be a problem.

John Larkin Highland Technology, Inc picosecond timing laser drivers and controllers jlarkin att highlandtechnology dott com http://www.highlandtechnology.com

Some employ a bridge in the manner of Sir Charles Wheatstone FRS, the sensitive element/heater being a fine wire of Wolfram encased in Element 79.

Best regards, Spehro Pefhany

There was an old publication, where someone hacksawed a metal-case tube open and fitted thermocouple elements to the tube wires, then soldered or brazed the metal case to his vacuum fitting. So, the usual run of thermocouple gages use an 8-pin octal tube base, because the commercial units started out as copies of his homebrew device.

The nice thing about thermocouples for temperature differencing, is the absolutely perfect zero you get at zero delta-T.

So the heater is only on one side of the Tee? I'm not really seeing what the second RTD is for.

Yeah, I was thinking maybe a nickel plated brass tube with RTD stuffed in one side and heater in the other. Radiation goes as T^4 and the gas conductivity ~T^1 so there should be some sweet spot where the radiation is small.

(If I did different temperatures, maybe I can tease out the radiation part.)

Then I just have to think about conduction down the wire leads (Phosphur bronze... or maybe even stainless?)

George H.

Yeah, I've got some small tungsten bulbs resistance of ~120 ohms at room te mperature. (You can see the resistance increase as you measure it with the DMM... Time constant of a few seconds.) Resistance is ~ proportional to the absolute temperature. So not as much sensitivity as I might get from a 10k ohm ther mistor. Hmm I could use two of them though and leave one in it's bulb. Th at might help with sensitivity at low pressures.

The one element trick is cute, but I can't help think that separating the h eating and sensing give me more options.

George H.

Yeah I like that it gets rid of the effect of changes in ambient temperature. (I don't have a good feel for how much of an error that is... I guess it gets smaller as I raise the operating temperature of the thing.)

What I'd really like is a decent "zero". I don't like the big DC offset in the thermistor /Pirani circuit. And thermal couple gauges are a bit flaky near ~10 milli-torr. (Wiggle the contacts or bump on the scale and the zero moves around.)

I'll have to put in some numbers.

George H.

For a really good 'zero' at zero pressure I imagine you're looking at creating a reference vacuum. Otherwise a bridge and some compensation.

Speed of response is a big benefit. The time constant gets traded away like the capacitance of a PD with constant bias when you servo the temperature.

Spehro Pefhany

Maybe manganin.. 3 thou should be ~80-90 ohms/m.

Also handy for making precision WW resistors.

Best regards, Spehro Pefhany

I guess the least radiation happens for a small diameter, shiny (like platinum!) wire.

A wire filament is really not bad. A thin wire will have a low thermal conductivity. A broken light bulb starts to look pretty good... just hack half the bulb off with a Dremel, or even just punch a hole in it.

John Larkin Highland Technology, Inc picosecond timing laser drivers and controllers jlarkin att highlandtechnology dott com http://www.highlandtechnology.com

I haven't seen that; the heater is on a regulated current source (often AC) and the sensor wiring hasn't ever been bothersome. The lower vacuum range, we always used ionization detectors.

An eBay search for "Hastings vacuum" pulls up lots of dissectable examples of the commercial thermocouple gauges.

The car people have a different problem - they want to measure the mass of air flowing into an engine, not pressure, and at much higher pressures than you - but they seem to have settled on a separate sensor and heater. Their sensor has to get fairly close to the right answer to start with - I don't *know* but I think it's on the order of 0.5-1% - but they also have another control loop later (O2 sensor/injectors) that can compensate for some errors in the mass air flow measurement.

Their product volume is such that they can have whatever they want, and whatever it costs gets multiplied by 12 million a year (in the US), so there must be a reason that they spend "extra" money on the two separate components. :)

Matt Roberds

Yeah this is some cheap TC gauge. But to be honest, that's just an excuse. It's much more fun to build it yourself.

I put the Thermistor circuit together with to 10k (T= 25C) ones. (putting in numbers the V^2 term adds up fast.)

I didn't measure room temp so delta T is a bit uncertain. (No vacuum so I stuck the thermistor in a piece of foam.) at 2.5 k ohm (~60C) it stabilized at 19.1 V ~145 mW. I was thinking I would like to throw away more power. Maybe some Aluminum foil stuck onto the thermistor?

George H.

Yeah lots more options when separated. I was thinking the loop might be better if it was linear in power. A FET heater a constant V with current control. Then let the thermistor measure T without the heater stress... I mean, you could worry that current/heat changes the R and the calibration.

How do they (auto industry) measure flow? A know impedance and measure the pressure drop?

I could tell a funny story about flow impedance and my first Helium-4 pot. I made a factor of 10 mistake in my calculation.. converting from Pascals to atm. or Torr.

To make it you crammed nickle wire (I think) into thin walled stainless. (really small ID) making a factor of ten mistake I crammed x10 more than needed. (A lot more work!)

Worked for s*it, which sent me back to my calculations.

Measure twice and cut once, George H.

The Bosch document that Lasse linked claims +/- 4% for one series of parts and 3% for another. I wasn't *that* far off.

Lasse linked you the Bosch document, which has a good explanation. Older ones had a wire sitting in the airstream as the heater, which would sometimes get crud on it and affect the calibration. One partial solution was to heat the wire hotter than normal for a minute or so, after you shut the engine down, in an attempt to burn off the crud. When the car had a *lot* of miles on it, sometimes you had to clean the crud off yourself with solvent spray, or a very gingerly applied Q-tip (the wire was pretty small gauge).

The old way (1970s) was a flap vane connected to a potentiometer. Yes, really! It fed an analog fuel injection computer.

Some cars don't have a mass air flow sensor; they measure the temperature of the incoming air, the intake manifold pressure, and the RPM. The computer knows the engine displacement, so it can calculate the air mass from all those numbers.

I've gotten kHz and MHz confused before, which has caused my code to do strange things. :)

...and have enough stuff on hand to do it over.

Matt Roberds

Join the Discussion

Have something to add? Share your thoughts — no account required.

Didn't find your answer?

Ask the community — no account required