I've been thinking about measuring pressure. What I call "thermal" pressure gauges. The point where the thermal conductivity of the gas goes away.
1 Torr to 1 milli Torr (or so) These come in two flavors, two lead Pirani's (the element is both heater and sensor) and four lead Thermocouple where there is a separate heater and sensor. (The sensor could also be an RTD.) (Hmm , you might want six leads, four for the thermometer.)
Here's wiki's start.
and Piranis
The thermocouple link is weak,
But I don't really like TC as temp sensors, always contact issues.
I like this idea of a thermistor as a "Pirani".
A nice cute loop...though I might sprinkle in some more opamps to make life easier, And He's got real data!!! with the voltage still rising at 100 torr (1 micron = 1 milli Torr)
I don't like the big DC offset (at low pressure) this could be from the leads or radiation losses. (maybe run at a lower temperature.)
So that brings me to my three questions. What style (heater and sensor in one, or separate) What resistance (of sensor and heater) operated at what temperature (above ambient) (I'm leaning towards R's as big as possible and lower temperature differences...)
George H.