Unfortunately that is dictated by what is available. If it has to be servoed I try to get dual-FETs, else PIN diodes, sometimes a dual-gate RF FET as a controlled resistor. Usually in an L-R setup. I rarely need >500psec vernier but for really long ones there is no choice and it has to be LC with varicaps. The impedance situation is ugly but if you have to delay a clock without introducing much phase noise that's still ok.
The challenge is not so much the delay itself but to come up with a scheme that auto-calibrates. You usually can't calibrate during production because all this is rather drifty. Sometimes I can sneak in pilot tones. Other times they give me time slots for pulses, for example frame reset in imaging systems or part of the pulse trundle-out time on ultrasound systems. That's often duked out over a beer down at the saloon :-)
The only thing that I have (so far) never seen work in a noise-sensitive scenario are silicon delay lines. I designed a few out because they had the noise behavior of Niagara Falls, plus they were freaking expensive boutique parts.