Within just the last decade, single transistors finally overtook tubes even in niche circuits -- to be honest, this is probably not so much a technological leap, as it simply being economical for manufacturers to target that space.
Example: IXYS IXTX1R4N450HV
4.5kV 1.4A 960W 40 ohm 88nC
Not that 960W is a realistic figure, as usual, but it's probably good for
100W or more with adequate heatsinking (splurging for a nice thick AlN insulator would be a nice touch, at these voltages).
Compare:
6LW6
7kV 1.4Apk? 40W 40pF
Little data on this particular tube, but we can assume it saturates somewhere around 50-100V at that 1.4A peak, and maybe is capable of 2A or more (at somewhat higher voltage drop). So, comparable on-resistance. Likewise, safe to assume around 150V grid drive is needed to switch it, giving a grid charge somewhere around 10nC (which, at the 15 times higher voltage swing, is 1.7 times more grid power).
The MOSFET may not perform very well, as MOSFETs go; the long channel has a long transit time. Though it seems to be limited by internal R_G more than that (t_r = 60ns is the published figure).
The tube can go about as fast as you can push it, which is pretty challenging for so much swing (especially if you only have more tubes to generate that swing), but also suffers from stray inductance through its poorly connected octal socket, and tall body. (Contemporary Compactrons usually made two connections to each grid.)
Anyway, the transistor handily outperforms the tube in most absolute measures... not to mention size and not needing 18W of heater power.
Supposedly there are single MOSFETs and IGBTs out there, rated for upwards of 10kV, using SiC. Haven't seen anything near that from the usual suppliers; they may be special order, or restricted (a few would make a lovely near-field EMP generator). Have seen papers discussing their use on distribution lines (so, ~4.8kV AC, direct connection -- no transformer required), for grid and maritime purposes.
Tim