So I have this project looking to measure babies' blood oxygenation noninvasively, i.e. using an optical sensor looking through the mom's abdomen.
The idea is to make the business end cheap--ideally disposable. Come with me, if you will, on a trip down memory alley.
Circa 1992, my friend and colleague Ted van Kessel and I did an interesting semiconductor process control instrument for DRAM fab at IBM, Burlington VT. (This was back in the 0.5-micron days, when optical inspection was competitive.)
At the time, photoresist was generally acid catalyzed, i.e. it developed something like photographic film. The litho tool (wafer stepper) exposed the resist, liberating a bit of acid. Then the wafer went onto a hot plate so that the acid could act like developer, breaking a bunch more bonds and rendering the image developable.
The resulting line width depended on both the exposure dose and the temperature/duration of the bake step. So Ted and I built this gizmo to look at the diffraction pattern of the latent image as it developed on the hot plate, and lift the wafer off it when the diffracted beam strength was just right. That way we had a closed-loop method for controlling line width in litho, shazam. (Turned out the fab folks didn't want it, but I digress.)
IBM's DRAM cells were arranged in a hexagonal pattern, so when you shined a LED vertically down on the wafer, you got a hexagonally-symmetric optical diffraction pattern from the latent image in the resist, with some contribution from the lower layers (previously fabricated). Ordinarily you'd only need one diffracted order for a measurement like that, but to correct for diffraction from the underlying structure we needed clean +-1 orders in at least one of the three symmetry axes of the hexagonal pattern. Unfortunately, there was no way to control the orientation of the wafer on the hot plate, because previously there was no reason to care about it, so the diffraction orders could be anywhere in azimuth.
We wound up with seven 1x3-inch solar cells arranged like a 360-degree poker hand around the vertical axis (i.e. with a bit of a taper in the direction away from the wafer). With sevenfold symmetry, regardless of how the wafer was oriented, we got clean measurements of at least one
+-1 order pair.Those cells worked fine up to about 20 kHz, running into a common-emitter stage followed by a regular op amp TIA. All the cathodes were connected to the summing junction, and the anodes were multiplexed to ground using open-drain outputs of a zero-power PAL (PALCE16V8Z). (Zero-power PALs didn't push power supply noise out their outputs when in open-drain mode.) So probably 20 nF or so.
Coming back to the fetal pulse ox gizmo, I thought it would be fun to see how fast a modern amorphous cell could go. I got some 30x50 cm ones from AliExpress, which looked OK, and in fact they work fine for their advertised use.
Turns out that they have about 1.5_MICROFARAD_ shunt capacitance. Where's Radio Shack when you need them?
Cheers
Phil Hobb