When I measured impedance of the RF system, I discoved decreasing imaginary part(minus value). but!! it is minus value(like -5 -10
-12...) and the real part of impednace was incresed accoding to the increasing power(13.56MHz). finally we find decreasing the impednce
I have a few question
- I wondering the deceasing imaginaey part of impedance(minus) whats the meaning? acually RF system is inductively coupled plasma source for plasma processing these are consist of coil, quartz, vacuum. we applied 13.56MHz RF power to the coil(3 of 4 turn) and by using V/I probe which installed between rf matching network and coil.
- when i measured the electrical properties of system(current voltage and phase) how to calculate the inductance of coil?
please let me know