Question regarding inter-trace capacitance of spiral inductor

Xould some electronics guru please clarify this a bit ? I have some questions about the inter-trace capacitance of a spiral inductor is given by the expression Cs = (n.w^2.epsilon_substrate)/t_sub_M1_M2 where n is the total number of overlaps, w is the trace width epxilon_substrate is the permittivity of the substrate and t_sub_M1_M2 is the thickness of substrate layer between the parallel metal segments, and the underpass. What does this mean ? For example, suppose that there are two metal traces, each of width 'w', separated by a distance 's', and the insulating substrate thickness id t_sub. What would the value of t_sub_M1_M2 be ? That is t_sub_M1_M2 = ??? Any hints/suggestions would be greatly appreciated. Thanks in advance.

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dakupoto
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