Measuring the capacitance of devices that have very low values is difficult, unless you have the right measuring instrument, and the right fixtures. In the case of all types of SMT components, what's really needed is custom-crafted PCBs. Nine years ago I set my PCB engineer, Chuck Fisk, to create such a board, really a set of boards, with common resistor pads. In general confusion of the time, I lost track of the file, but yesterday found it again. It looked good, but I wanted to add more kinds of items, transistors, op-amps, diodes, etc. Also, he had come up with some unusual pad types, so I deleted many of them.
It has a few motherboards to connect instruments like an HP 4280A or 4192A, measuring to 0.001pF. There are 85 daughterboards for test components.
I have five empty locations left - I'm wondering if any of you have some other good candidates?