Hi,Graham Thanks for your reply! I've also got this manual and read it in detail! when I ran a program designed by myself it displayed that the mesh could not be defined! So I don't know how to define a rectangular mesh using line command! And the following is my program which easily modeling the ion implantation process would you pls debug it for me!
#the x dimension definition line x loc = -4.0 tag = lft line x loc = 0.0 spacing=0.05 line x loc = 5.0 tag = rht
#the vertical definition line y loc = 0 spacing = 0.02 tag = top line y loc = 1.5 spacing = 0.05 line y loc = 4.0 tag=bot
region silicon xlo = lft xhi = rht ylo = top yhi = top bound exposed xlo = lft xhi = rht ylo = bot yhi = bot
init boron conc=1e14 scale=2
deposit oxide thick=0.02
implant phos dose=3e14 energy=20 pearson
diffuse time=30 temp=1000
structure outf=test.str
Thanks!